Liquid Flow Sensor SLF3S-1300F

SLF3S-1300F

Liquid Flow Sensor

Features:
  • Highly integrated: Linearized, temperature-compensated and fully calibrated digital output signal (I2C) from a single chip
  • Calibrated for water and IPA up to ± 40 ml /min (SLF3S-1300F) or ± 2000 µl/min (SLF3S-0600F)
  • Turn down ratio 200:1 or better
  • High speed measurement: Response time below 20 ms
  • Bidirectional measurement and real time failure detection
  • Easy fluidic and electrical integration via ¼″-28 flat bottom ports and a standard connector
  • Straight, unobstructed flow channel without moving parts
  • Media isolated sensing principle: no direct sensor contact with the fluid
  • Compact and light-weight form factor
  • Chemically resistant wetted materials

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Product Description

The SLF3S-1300F is Sensirion’s compact liquid flow sensor designed for high-volume applications. It enables precise and reliable measurements of dynamic liquid flow rates up to 40 ml/min bi-directionally. The SLF3S-1300F sensor features a digital interface (I2C) via a 6-pin standard electrical connector. The SLF3S-1300F builds on the latest generation CMOSens® sensor chip that is at the heart of Sensirion’s flow sensing platform and allows achieving an outstanding performance. The patented CMOSens® technology combines the sensor element, signal processing and digital calibration on a small CMOS chip. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

Specifications for liquid flow sensor SLF3S-1300F (all data for medium H2O, at 23°C, and for VDD 3.5V)

Parameter SLF3S-1300F
H2O Full scale flow rate ±40ml/min
H2O Sensor output limit ±65ml/min
Accuracy (whichever error is larger) ±5% of measured value
0.05ml/min
Repeatability (whichever error is larger) ±0.5% of measured value
0.01ml/min
Temperature coefficient (additional error / °C; whichever is larger) 0.2% measured value / °C
0.002ml/min / °C
Mounting orientation sensitivity <0.02ml/min

Specifications for liquid flow sensor SLF3S-1300F (all data for medium IPA, at 23°C, and for VDD 3.5V)

Parameter SLF3S-1300F
IPA Full scale flow rate ±40ml/min
IPA Sensor output limit ±65ml/min
Accuracy (whichever error is larger) ±10% of measured value
0.2ml/min
Repeatability (whichever error is larger) ±0.5% of measured value
0.01ml/min
Temperature coefficient (additional error / °C; whichever is larger) 0.2% measured value / °C
0.004ml/min / °C
Mounting orientation sensitivity <0.05ml/min

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