SFM3000
Low Pressure Drop Digital Flow Meter
- Very low pressure drop < 6mbar @ 200sml
- Flow range: +/-200slm (bidirectional)
- Accuracy 1.5% m.v.
- Ultra fast response time
- Digitally calibrated & temperature compensated
- Digital Output (I²C)
Product Description
The SFM3000 sensor is Sensirion’s digital flow meter designed for high-volume applications. It measures the flow rate of air, oxygen and other non-aggressive gases with superb accuracy. A special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for very demanding applications, such as medical ventilation and respiratory applications. The SFM3000 operates from a 5 Volt supply voltage and features a digital 2-wire I 2C interface. The measurement results are internally linearized and temperature compensated. The outstanding performance of this sensor is based on Sensirion’s patented CMOSens® sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement with best-in-class accuracy. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.
Physical Specifications
| Parameter | Condition | Value |
|---|---|---|
| Flow Ranges | Air/N2/O2 | -200 sml … +200 sml |
| Update Time | 14 bit | 0.5 ms |
| Accuracy Max. | span offset |
± 2.5% m.v. ± 0.1 slm |
| Accuracy Typ. | span offset |
± 1.5% m.v. ± 0.05 slm |
| Repeatability Max. | span offset |
± 1% m.v. ± 0.05 slm |
| Repeatability Typ. | span offset |
± 0.5% m.v. ± 0.02 slm |
| Noise Level Max. | span offset |
± 1% m.v. ± 0.1 slm |
| Noise Level Typ. | span offset |
± 0.5% m.v. ± 0.05 slm |
| Accuracy Shift Due to Temperature Variation Max. | span offset |
± 0.75% m.v. ± 0.0 slm |
| Accuracy Shift Due to Temperature Variation Typ. | span offset |
± 0.25% m.v. ± 0.0 slm |
| Position sensitivity | non-horizontal position | < 0.05 slm |
| Pressure Drop | @60slm @200slm |
< 100 / < 0.4 Pa / inH2O < 600 / < 2.4 Pa / inH2O |
